Published In

Applied Physics Letters

Document Type

Article

Publication Date

1-1-2007

Subjects

Nanotubes, Nanoelectromechanical systems, Transmission electron microscopy, Focused ion beams

Abstract

This study focuses on the fabrication of two nanodevice prototypes which utilized vertical and horizontal carbon nanotubes used the focused ion beam to localize the catalysts, followed by plasma-enhanced chemical vapor deposition. First, metal-gated carbon nanotube field emitter arrays were fabricated on multilayer substrates containing an imbedded catalyst layer. Second, horizontally aligned single-walled carbon nanotubes were grown on a transmission electron microscopy grid. This allows the carbon nanotubes to be directly analyzed in a transmission electron microscope. It is expected that the methodology introduced here will open up opportunities for the direct fabrication of carbon nanotube based nanodevices.

Description

© 2007 AIP Publishing LLC. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Applied Physics Letters and may be found at: http://dx.doi.org/10.1063/1.2802552

DOI

10.1063/1.2802552

Persistent Identifier

http://archives.pdx.edu/ds/psu/7318

Included in

Physics Commons

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