Location

Portland State University, Portland, Oregon

Start Date

12-5-2015 11:00 AM

End Date

12-5-2015 1:00 PM

Subjects

Manufacturing processes, Semiconductors -- Design and construction

Description

The development of a novel blood glucose sensor is realized through construction of a homemade plasma coating system and utilization of semiconductor manufacturing processes in a small scale cleanroom environment. Photolithography, plasma sputtering, chemical etching and thin film measurement technologies are used in the medical sensor fabrication process. General process flow will be discussed, and system design and the plasma sputtering process will be presented as it is achieved by the system currently under development.

Persistent Identifier

http://archives.pdx.edu/ds/psu/15293

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May 12th, 11:00 AM May 12th, 1:00 PM

Design, Construction, and Utilization of Physical Vapor Deposition Systems for Medical Sensor Fabrication

Portland State University, Portland, Oregon

The development of a novel blood glucose sensor is realized through construction of a homemade plasma coating system and utilization of semiconductor manufacturing processes in a small scale cleanroom environment. Photolithography, plasma sputtering, chemical etching and thin film measurement technologies are used in the medical sensor fabrication process. General process flow will be discussed, and system design and the plasma sputtering process will be presented as it is achieved by the system currently under development.