Document Type

Closed Project

Publication Date

Spring 2000

Course Number

EMGT 589/689



In this paper, the transition of 300 mm wafer size processing in the semiconductor industry is discussed in terms of reasons for the transition, its benefits and challenges, and the status of the transition based on the literature search.


In Copyright. URI: This Item is protected by copyright and/or related rights. You are free to use this Item in any way that is permitted by the copyright and related rights legislation that applies to your use. For other uses you need to obtain permission from the rights-holder(s).


This project is only available to students, staff, and faculty of Portland State University

Persistent Identifier