Economics of Technology Innovation
Extreme ultraviolet lithography -- Industrial applications, Technological innovations -- Management, Engineering -- Management
It is generally recognized by economist and policy makers that new technology will be the driving force in our economy. With the greatest need for high-speed computing, better memory storage application and the development of micro-electrical-mechanical structures, a lithography technology is needed to realize such objectives. It is the main reason why a consortium composed of big names in the semiconductor industry was established in order to transform the benefits of Extreme Ultraviolet Lithography technology into a commercial application.
Lubis, Ahmad; Mulia, Farolan; Patdu, Archie; and Takeshita, Atsunobu, "Extreme Ultraviolet Lithography" (2001). Engineering and Technology Management Student Projects. 2155.