Document Type

Closed Project

Publication Date

Spring 2003

Instructor

Timothy Anderson, Wayne Wakeland

Course Title

Manufacturing Systems Simulation

Course Number

EMGT 553/663

Abstract

Strategy and Expectations:

For the class project, I decided to build a model that would approximate the way an ION implant cell in a semiconductor manufacturing fab is run. I have spent several years working in the implant area and I felt that a better understanding of the cell's behavior was needed.

Rights

In Copyright. URI: http://rightsstatements.org/vocab/InC/1.0/ This Item is protected by copyright and/or related rights. You are free to use this Item in any way that is permitted by the copyright and related rights legislation that applies to your use. For other uses you need to obtain permission from the rights-holder(s).

Comments

This project is only available to students, staff, and faculty of Portland State University

Persistent Identifier

http://archives.pdx.edu/ds/psu/23860

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