Document Type

Post-Print

Publication Date

9-2017

Subjects

Scanning electron microscopes -- Design and construction, Scanning probe microscopy -- Technological innovations, Scanning probe microscopy -- Technique

Abstract

A Scanning Probe Microscope (SPM) stage controlled by 3 stepper motors is designed in this project. The SPM stage controlled by 3 steppers is more versatile than a stage controlled by one motor, but the control of the system is more complicated. In this project, we build the stage actions in an Arduino microcontroller. A finite state machine (FSM) is also built in Arduino to communicate with a PC and an RF controller. A special displaying scheme which has 5 states, is also employed to indicate the operation of the stage. Finally, the SPM stage is fully tested and has a 700 nm mechanical resolution in the Z direction.

Description

This is an Accepted Manuscript of an article published in the Journal of Measurement Science & Instrumentationon, Sep2017, Vol. 8 Issue 3, p271-276 and is available online: http://cstm.cnki.net/stmt/TitleBrowse/KnowledgeNet/CSKX201703011?db=STMJLAST2017

Persistent Identifier

https://archives.pdx.edu/ds/psu/26718

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