A Scanning Probe Microscope (SPM) stage controlled by 3 stepper motors is designed in this project. The SPM stage controlled by 3 steppers is more versatile than a stage controlled by one motor, but the control of the system is more complicated. In this project, we build the stage actions in an Arduino microcontroller. A finite state machine (FSM) is also built in Arduino to communicate with a PC and an RF controller. A special displaying scheme which has 5 states, is also employed to indicate the operation of the stage. Finally, the SPM stage is fully tested and has a 700 nm mechanical resolution in the Z direction.
Bai, Jianghua and La Rosa, Andres H., "An SPM Stage Driven by 3 Stepper Motors" (2017). Physics Faculty Publications and Presentations. 322.