First Advisor

W. Robert Daasch

Date of Publication

Winter 3-1-2012

Document Type

Thesis

Degree Name

Master of Science (M.S.) in Electrical and Computer Engineering

Department

Electrical and Computer Engineering

Language

English

Subjects

Integrated circuits -- Defects -- Analysis, Expectation-maximization algorithms, Order statistics

DOI

10.15760/etd.90

Physical Description

1 online resource (ix, 80 pages)

Abstract

This thesis presents a statistical method to identify the test escapes. Test often acquires parametric measurements as a function of logical state of a chip. The usual method of classifying chips as pass or fail is to compare each state measurement to a test limit. Subtle manufacturing defects are escaping the test limits due to process variations in deep sub-micron technologies which results in mixing of healthy and faulty parametric test measurements. This thesis identifies the chips with subtle defects by using rank order of the parametric measurements. A hypothesis is developed that a defect is likely to disturb the defect-free ranking, whereas a shift caused by process variations will not affect the rank. The hypothesis does not depend on a-priori knowledge of a defect-free ranking of parametric measurements. This thesis introduces a modified Estimation Maximization (EM) algorithm to separate the healthy and faulty tau components calculated from parametric responses of die pairs on a wafer. The modified EM uses generalized beta distributions to model the two components of tau mixture distribution. The modified EM estimates the faulty probability of each die on a wafer. The sensitivity of the modified EM is evaluated using Monte Carlo simulations. The modified EM is applied on production product A. An average 30% reduction in DPPM (defective parts per million) is observed in Product A across all lots.

Rights

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Persistent Identifier

http://archives.pdx.edu/ds/psu/7968

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