Sponsor
Financial support for this research was provided in part by the National Science Foundation under Award Nos. ECS-0348277, ECS-0520891, and DMR-0649280.
Published In
Applied Physics Letters
Document Type
Article
Publication Date
1-1-2007
Subjects
Nanotubes, Nanoelectromechanical systems, Transmission electron microscopy, Focused ion beams
Abstract
This study focuses on the fabrication of two nanodevice prototypes which utilized vertical and horizontal carbon nanotubes used the focused ion beam to localize the catalysts, followed by plasma-enhanced chemical vapor deposition. First, metal-gated carbon nanotube field emitter arrays were fabricated on multilayer substrates containing an imbedded catalyst layer. Second, horizontally aligned single-walled carbon nanotubes were grown on a transmission electron microscopy grid. This allows the carbon nanotubes to be directly analyzed in a transmission electron microscope. It is expected that the methodology introduced here will open up opportunities for the direct fabrication of carbon nanotube based nanodevices.
DOI
10.1063/1.2802552
Persistent Identifier
http://archives.pdx.edu/ds/psu/7318
Citation Details
Wu, J., Eastman, M., Gutu, T., Wyse, M., Jiao, J., Kim, S. M., ... Teo, K. B. K. (2007). Fabrication of carbon nanotube-based nanodevices using a combination technique of focused ion beam and plasma-enhanced chemical vapor deposition. [Article]. Applied Physics Letters, 91(17),
Description
© 2007 AIP Publishing LLC. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Applied Physics Letters and may be found at: http://dx.doi.org/10.1063/1.2802552