Systems for Assessing and Enhancing the Performance of Scanning Electron Microscopes by Quantifying and Enforcing Symmetries and Periodicities in Two Dimensions

Authors

Peter Moeck, Portland State UniversityFollow

Document Type

Patent

Publication Date

9-2-2010

Subjects

Scanning probe microscopy -- Technological innovations, Scanning probe microscopy -- Calibration

Abstract

Scanning probe microscope (SPM) images are enhanced by enforcing one or more symmetries that can be selected based on suitable Fourier coefficient amplitude or phase angle residuals, and/ or geometric Akaike information criteria, and/ or cross correlation techniques. Alternatively, this selection can be based on prior knowledge of specimen characteristics. In addition, a scanning microscope point spread function is obtained based on the evaluation of a calibration image by enforcing at least one symmetry and can be applied to other image acquisitions.

Description

United States Patent Application Publication. Pub. No.: US 2010/0223697 A1

Persistent Identifier

http://archives.pdx.edu/ds/psu/16115

Citation Details

Moeck, Peter. "Systems for assessing and enhancing the performance of scanning probe microscopes by quantifying and enforcing symmetries and periodicities in two dimensions." U.S. Patent No. 8,196,216. 5 Jun. 2012.