Topological Insulator Bi2Se3 Films on Silicon Substrates
Published In
Journal of Electronic Materials
Document Type
Citation
Publication Date
3-1-2020
Abstract
We have employed atomic layer deposition to produce uniform films of Bi2Se3Bi2Se3, which is a 3D topological insulator (TI), over 5 cm ×× 5 cm SiO2SiO2-coated Si substrates. The crystalline properties of the films were characterized via Raman spectroscopy, x-ray diffraction, cross-sectional transmission microscopy, and atomic force microscopy, which confirmed the high quality of the films. The TI properties were examined using Hall bridge structures and recording magnetoresistance at 1.9 K. A weak anti-localization effect was observed at low field, from which a phase coherent length of 242 nm and prefactor αα value of 1 were determined, indicating desirable topological properties. This approach for film growth provides a path for integrating a 3D topological insulator with silicon integrated circuit technology.
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DOI
10.1007/s11664-019-07899-9
Persistent Identifier
https://archives.pdx.edu/ds/psu/32673
Citation Details
Plachinda, P., Hopkins, M., Rouvimov, S. et al. Topological Insulator Bi2Se3 Films on Silicon Substrates. Journal of Elec Materi 49, 2191–2196 (2020). https://doi.org/10.1007/s11664-019-07899-9
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