Presentation Type
Poster
Location
Portland State University, Portland, Oregon
Start Date
5-12-2015 11:00 AM
End Date
5-12-2015 1:00 PM
Subjects
Manufacturing processes, Semiconductors -- Design and construction
Student Level
Undergraduate
Abstract
The development of a novel blood glucose sensor is realized through construction of a homemade plasma coating system and utilization of semiconductor manufacturing processes in a small scale cleanroom environment. Photolithography, plasma sputtering, chemical etching and thin film measurement technologies are used in the medical sensor fabrication process. General process flow will be discussed, and system design and the plasma sputtering process will be presented as it is achieved by the system currently under development.
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Persistent Identifier
http://archives.pdx.edu/ds/psu/15293
Included in
Design, Construction, and Utilization of Physical Vapor Deposition Systems for Medical Sensor Fabrication
Portland State University, Portland, Oregon
The development of a novel blood glucose sensor is realized through construction of a homemade plasma coating system and utilization of semiconductor manufacturing processes in a small scale cleanroom environment. Photolithography, plasma sputtering, chemical etching and thin film measurement technologies are used in the medical sensor fabrication process. General process flow will be discussed, and system design and the plasma sputtering process will be presented as it is achieved by the system currently under development.