Title of Poster / Presentation
Presentation Type
Poster
Location
Portland State University, Portland, Oregon
Start Date
5-12-2015 11:00 AM
End Date
5-12-2015 1:00 PM
Subjects
Manufacturing processes, Semiconductors -- Design and construction
Abstract
The development of a novel blood glucose sensor is realized through construction of a homemade plasma coating system and utilization of semiconductor manufacturing processes in a small scale cleanroom environment. Photolithography, plasma sputtering, chemical etching and thin film measurement technologies are used in the medical sensor fabrication process. General process flow will be discussed, and system design and the plasma sputtering process will be presented as it is achieved by the system currently under development.
Rights
© Copyright the author(s)
IN COPYRIGHT:
http://rightsstatements.org/vocab/InC/1.0/
This Item is protected by copyright and/or related rights. You are free to use this Item in any way that is permitted by the copyright and related rights legislation that applies to your use. For other uses you need to obtain permission from the rights-holder(s).
DISCLAIMER:
The purpose of this statement is to help the public understand how this Item may be used. When there is a (non-standard) License or contract that governs re-use of the associated Item, this statement only summarizes the effects of some of its terms. It is not a License, and should not be used to license your Work. To license your own Work, use a License offered at https://creativecommons.org/
Persistent Identifier
http://archives.pdx.edu/ds/psu/15293
Included in
Design, Construction, and Utilization of Physical Vapor Deposition Systems for Medical Sensor Fabrication
Portland State University, Portland, Oregon
The development of a novel blood glucose sensor is realized through construction of a homemade plasma coating system and utilization of semiconductor manufacturing processes in a small scale cleanroom environment. Photolithography, plasma sputtering, chemical etching and thin film measurement technologies are used in the medical sensor fabrication process. General process flow will be discussed, and system design and the plasma sputtering process will be presented as it is achieved by the system currently under development.